Chapter: VLSI Design : CMOS Technology

CV characteristics

The measured MOS capacitance (called gate capacitance) varies with the applied gate voltage.

CV CHARACTERISTICS

The measured MOS capacitance (called gate capacitance) varies with the applied gate voltage.

1. A very powerful diagnostic tool for identifying any deviations from the ideal in both oxide and semiconductor

2. Routinely monitored during MMOS device fabrication

Measurement of C-V characteristics

–Apply any dc bias, and superimpose a small (15 mV) ac signal

–Generally measured at 1 MHz (high frequency) or at variable frequencies

between 1KHz to 1 MHz

–The dc bias VG is slowly varied to get quasi-continuous C-V characteristics

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VLSI Design : CMOS Technology : CV characteristics |